University of Michigan Dedicates Lurie Nanofabrication Facility

Published April 2008

ANN ARBOR, MICH. -

The University of Michigan dedicated the Robert H. Lurie Nanofabrication Facility at the School of Engineering in Ann Arbor on April 12, 2008. Designed by SmithGroup, the project is a 32,000-sf addition to the existing Solid State Electronics Laboratory (SSEL) cleanroom facility. Featuring a three-level cleanroom concept, the project includes a fab, sub-fab, and mechanical space. Supporting etch, diffusion, lithography, deposition, and thin films techniques and tools, the expansion incorporates a modular aluminum wall panel system for ease of reconfiguration.

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