Critical vibration control strategies for nanolithography, e-beam metrology and high-sensitivity instruments

Steven Ryan
Divisional Vice President
TMC

Electron beam lithography, electron microscopes, and emerging ultra-precision instruments are becoming critical for the success of nanotech, materials, and life science research programs and facilities, and building vibration is a potential program killer you need to get ahead of! Steve Ryan details how to plan for the extremely low-vibration environments demanded by nanoscale and other advanced research spaces, including passive vibration isolation, massive isolated plinths, and point-of-use inertial active vibration control pedestals. He examines case studies of new construction and renovations at Oregon Health & Sciences University, MIT.Nano, and the New York Structural Biology Center. 

Continuing Education
AIA CES Units: 
1.00
HSW Units: 
1.00