Electron beam lithography, electron microscopes, and new ultra-precision instruments on the horizon are becoming critical for the success of nanotech, materials, and life science research programs and facilities, and building vibration is a potential program killer you need to get ahead of! Steve Ryan details how to plan for the extremely low-vibration environments demanded by nanoscale and other advanced technology spaces, including passive vibration isolation, massive isolated plinths, and point-of-use inertial active vibration control pedestals. He examines case studies of new construction and renovations at higher education engineering and advanced technology facilities.