Critical vibration control strategies for nanolithography, e-beam metrology and high-sensitivity instruments

Steven Ryan
Divisional Vice President

Electron beam lithography, electron microscopes, and emerging ultra-precision instruments are becoming critical for the success of nanotech, materials, and life science research programs and facilities, and building vibration is a potential program killer you need to get ahead of! Steve Ryan details how to plan for the extremely low-vibration environments demanded by nanoscale and other advanced technology spaces, including passive vibration isolation, massive isolated plinths, and point-of-use inertial active vibration control pedestals. He examines case studies of new construction and renovations at Oregon Health Sciences University, MIT.Nano, and the New York Structural Biology Center. 

Continuing Education
American Institute of Architects (AIA)
AIA Health, Safety and Welfare (HSW)
Professional Development Hour (PDH)